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  • Large Area Fabrication of Leaning Silicon Nanopillars for ...

    The nanopillars are made from silicon and the resulting SERS substrate exhibit a remarkably large Raman enhancement due to analyte trapping. The substrate can be fabricated in any silicon processing facility to produce large areas of SERS substrates at a minimal cost. The silicon nanopillars are defined by maskless dry etching.

  • Cited by: 359
  • Large Area Fabrication of Leaning Silicon Nanopillars for ...

    Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy Adv Mater . 2012 Mar 8;24(10):OP11-8. doi: 10.1002/adma.201103496.

  • Cited by: 359
  • Large Area Fabrication of Leaning Silicon Nanopillars for ...

    ible free standing nanopillars for SERS. The nanopillars are made from silicon and the resulting SERS substrate exhibit a Michael Stenbæk Schmidt,* Jörg Hübner, and Anja Boisen Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman

  • Cited by: 359
  • Nanopillars: Large Area Fabrication of Leaning Silicon ...

    Nanopillars: Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy (Adv. Mater. 10/2012) Michael Stenbæk Schmidt. Corresponding Author. E-mail address: [email protected] DTU Nanotech, Technical University of Denmark, Department of Micro‐ and Nanotechnology, Ørsteds Plads, Building 345 east, 2800 Kgs. Lyngby, Phone: +45 45 25

  • Large Area Fabrication of Leaning Silicon Nanopillars for ...

    An undoped single crystal silicon wafer with a diameter of 4 inches is processed with an Advanced Silicon Etcher (Surface Technology Systems MESC Multiplex ICP, Newport, UK) to form a large area

  • Nanopillars: Large Area Fabrication of Leaning Silicon ...

    Nanopillars: Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy (Adv. Mater. 10/2012) By Michael Stenbæk Schmidt, Jörg Hübner and Anja Boisen. Cite . BibTex; Full citation; Topics: Surface enhanced raman spectroscopy, Substrate fabrication, Maskless reactive ion etching, Leaning silicon nanopillars;, Hot spots . Publisher: Wiley - V C H Verlag GmbH ...

  • Large area fabrication of leaning silicon nanopillars for ...

    Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy . By Michael Stenbæk Schmidt, Jörg Hübner and Anja Boisen. Cite . BibTex; Full citation; Publisher: Wiley - V C H Verlag GmbH Co. KGaA. Year: 2011. DOI identifier: 10.1002 ...

  • Publications - Silmeco

    Summary: Wafer-scale surface-enhanced Raman scattering (SERS) substrates fabricated using maskless lithography are important for scalable production targets. Large-area, leaning silver-capped silicon nanopillar (Ag NP) structures suitable for SERS molecular detection at extremely low analyte concentrations are presented.

  • Sensitive and reproducible surface-enhanced raman ...

    With the low-cost nanosphere lithography, nanoimprint lithography, laser interference lithography and deep UV lithography, the area of the fabricated nanopillars can be scale up to entire inch wafer [ 25, 26 ]. Despite several advantages of naopillars as SERS substrates, there are still some issues.

  • Author: Weisheng Yue, Tiancheng Gong, Xiyu Long, Vasyl Kravets, Ping Gao, Mingbo Pu, Changtao Wang
  • Fabrication and characterization of Au dimer antennas on ...

    2017-06-30  Schmidt MS, Hubner J, Boisen A. Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy. Adv Mater 2012;24:OP11–8. [33] ↑ Wu K, Rindzevicius T, Schmidt MS, Mogensen KB, Hakonen A, Boisen A. Wafer-scale leaning silver nanopillars for molecular detection at ultra-low concentrations. J Phys Chem C 2015;119:2053–62. [34] ↑ Shegai T, Brian B,

  • Cited by: 5
  • Nanopillars: Large Area Fabrication of Leaning Silicon ...

    Request PDF Nanopillars: Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy (Adv. Mater. 10/2012) M. S. Schmidt et al. describe on page OP11 a

  • Nanopillars: Large Area Fabrication of Leaning Silicon ...

    Nanopillars: Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy (Adv. Mater. 10/2012) By Michael Stenbæk Schmidt, Jörg Hübner and Anja Boisen. Cite . BibTex; Full citation; Topics: Surface enhanced raman spectroscopy, Substrate fabrication, Maskless reactive ion etching, Leaning silicon nanopillars;, Hot spots . Publisher: Wiley - V C H Verlag GmbH ...

  • Large area fabrication of leaning silicon nanopillars for ...

    Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy . By Michael Stenbæk Schmidt, Jörg Hübner and Anja Boisen. Cite . BibTex; Full citation; Publisher: Wiley - V C H Verlag GmbH Co. KGaA. Year: 2011. DOI identifier: 10.1002 ...

  • Fabrication of Silicon Nanopillars for SERS - Advanced ...

    2012-03-06  The silicon nanopillars are formed via maskless dry etching. Afterwards silver is deposited onto the silicon nanopillars to form SERS-active substrates. One important point is that the nanopillars are flexible. So hot spots can be created with several pillars leaning together. This leaning effect enables a large enhancement of the Raman signal and therefore a much higher sensitivity ...

  • Plasmon resonances of Ag capped Si nanopillars fabricated ...

    Plasmon resonances of Ag capped Si nanopillars fabricated using mask-less lithography ... leaning of pillars. The resonance position of the cavity resonance mode can be tuned primarily via the diameter of the Si pillar, and cannot be tuned via leaning of Ag NPs. The presence of a substrate dramatically changes the intensity of these two LSPR modes by introducing constructive and destructive ...

  • Fabrication and characterization of Au dimer antennas on ...

    Schmidt MS, Hubner J, Boisen A. Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy. Adv Mater 2012;24:OP11–8. [33] ↑ Wu K, Rindzevicius T, Schmidt MS, Mogensen KB, Hakonen A, Boisen A. Wafer-scale leaning silver nanopillars for molecular detection at ultra-low concentrations. J Phys Chem C 2015;119:2053–62. [34] ↑ Shegai T, Brian B, Miljković ...

  • Fast fabrication of silicon nanopillar array using ...

    2020-04-15  In this paper, a two-layer exposure method in EBL (Raith EBPG5200) with Gaussian beam has been proposed to realize fast fabrication of large area silicon nanopillar array. The nanopillars are patterned by writing two layers of orthogonal gratings successively in one exposure job.

  • Evaluation of an on-site surface enhanced Raman scattering ...

    2020-05-19  Schmidt and coworkers fabricated a large area of leaning nanopillars by a maskless reactive ion etch process, providing a high aspect ratio. The

  • Sub-10 nm Fabrication of Large Area Periodic Nanopillars

    Sub-10 nm Fabrication of Large Area Periodic Nanopillars Chun-Wen Kuo, Jau-Ye Shiu and Peilin Chen* Institute of Applied Science and Engineering Research, Academia Sinica, 128, Section 2, Academia Road, Nankang, Taipei 115, Taiwan Abstract Here we present a large-area fabrication technique that is capable of producing size-tunable periodic silicon nanopillar arrays with sub-10 nm

  • OSA Fabrication of Si3N4/SiO2 tiered resonant ...

    M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24 (10), OP11–OP18 (2012).

  • OSA Plasmon resonances of Ag capped Si nanopillars ...

    M. S. Schmidt, J. Hübner, and A. Boisen, “Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy,” Adv. Mater. 24 (10), OP11–OP18 (2012).

  • Large area fabrication of leaning silicon nanopillars for ...

    Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy . By Michael Stenbæk Schmidt, Jörg Hübner and Anja Boisen. Cite . BibTex; Full citation; Publisher: Wiley - V C H Verlag GmbH Co. KGaA. Year: 2011. DOI identifier: 10.1002 ...

  • Deterministic Silicon Pillar Assemblies and their Photonic ...

    Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy. M. Schmidt, Jörg Hübner, Anja Boisen; Materials Science, Medicine; Advanced materials; 2012; VIEW 1 EXCERPT. The Past, Present, and Future of Silicon Photonics. R. A. Soref; Physics; IEEE Journal of Selected Topics in Quantum Electronics ; 2006; VIEW 1 EXCERPT. Silicon Photonics: The State of

  • Fabrication and Process Optimization of Wafer-scale ...

    [1] M. S. Schmidt, J. Hübner, A. Boisen, Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy, Advanced Materials. 2012, 24, 11. Conclusion A simple approach for mass-production of wafer-scale Ag capped Si SERS nanopillars is presented. Optimization is done to improve SNR of the substrate. Experimental ...

  • Fabrication of large-scale periodic silicon nanopillar ...

    2007-09-15  We present a fabrication procedure that can form large-scale periodic silicon nanopillar arrays for 2D nanomold which determines the feature size of nanoimprint lithography, using modified nanosphere lithography. The size of silicon nanopillars can be easily controlled by an etching and oxidation process.

  • Figure 3.4 from Deterministic Silicon Pillar Assemblies ...

    Deterministic Silicon Pillar Assemblies and their Photonic Applications @inproceedings{Choudhury2016DeterministicSP, title={Deterministic Silicon Pillar Assemblies and their Photonic Applications}, author={B. Choudhury}, year={2016} } B. Choudhury; Published 2016; Engineering; It is of paramount importance to our society that the environment, life style, science and

  • Fabrication of Size-Tunable Large-Area Periodic Silicon ...

    Here, we present a fabrication procedure that can produce large-area, size-tunable, periodic silicon nanopillar arrays, using metal templates that are created via nanosphere lithography. The size of the silicon nanopillars can be systematically controlled by an oxidation and etching process. The smallest size of nanopillars fabricated via this method is ∼9 nm, and the area covered with ...

  • Sub-10 nm Fabrication of Large Area Periodic Nanopillars

    Sub-10 nm Fabrication of Large Area Periodic Nanopillars Chun-Wen Kuo, Jau-Ye Shiu and Peilin Chen* Institute of Applied Science and Engineering Research, Academia Sinica, 128, Section 2, Academia Road, Nankang, Taipei 115, Taiwan Abstract Here we present a large-area fabrication technique that is capable of producing size-tunable periodic silicon nanopillar arrays with sub-10 nm

  • Contents: (Adv. Mater. 10/2012), Advanced Materials 10 ...

    2012-08-08  OP11–OP18 Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy COMMUNICATION Microstructures Modal gain per unit length versus launched pump power is predicted and 3+ measured in a 47.5 at.% Yb -doped D. Geskus, S. Aravazhi, potassium double tungstate channel S. M. García-Blanco, waveguide. The highest measured gain M.

  • Optimizing Signal-to-Noise Ratio of SERS Ag Capped Si ...

    Recorded SERS spectra exhibit uniform E-field enhancement properties while retaining low background signals over large surface areas (>cm2). Reference: M. S. Schmidt, J. Hübner, A. Boisen, Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy, Advanced Materials. 2012, 24, 11.

  • OSA Plasmon resonances of Ag capped Si nanopillars ...

    M. S. Schmidt, J. Hübner, and A. Boisen, “Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012). [PubMed] K. Y. Wu, X. L. Cheng, and L. P. Lee, “Intra-particle coupling and plasmon tuning of multilayer Au/dielectric/Au nanocrescents adhered to a dielectric cylinder,” Nanotechnology 23(5), 055201 (2012).

  • Fast fabrication of silicon nanopillar array using ...

    Consequently, EBL is difficult to apply to the fabrication of the silicon nanopillar array with large area. In this paper, a two-layer exposure method in EBL (Raith EBPG5200) with Gaussian beam has been proposed to realize fast fabrication of large area silicon nanopillar array. The nanopillars are patterned by writing two layers of orthogonal gratings successively in one exposure job. The ...

  • Fabrication of Size-Tunable Large-Area Periodic Silicon ...

    Here, we present a fabrication procedure that can produce large-area, size-tunable, periodic silicon nanopillar arrays, using metal templates that are created via nanosphere lithography. The size of the silicon nanopillars can be systematically controlled by an oxidation and etching process. The smallest size of nanopillars fabricated via this method is ∼9 nm, and the area covered with ...

  • Fabrication and simulation of neutral-beam-etched silicon ...

    1. Introduction. Silicon nanopillars are promising for more than Moore applications due to the tunable energy-band profiles and the high surface-to-volume ratio, compared with the materials of bulk silicon [].The fabrication process of silicon nanopillars can be classified into top-down [2,3] and bottom-up [4,5] methods.Top-down methods are more reproducible than bottom-up methods due to the ...

  • Optimizing Signal-to-Noise Ratio of SERS Ag Capped Si ...

    Recorded SERS spectra exhibit uniform E-field enhancement properties while retaining low background signals over large surface areas (>cm2). Reference: M. S. Schmidt, J. Hübner, A. Boisen, Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy, Advanced Materials. 2012, 24, 11.

  • Fabrication of Periodic Silicon Nanopillars in a Two ...

    We present a method to fabricate well-controlled periodic silicon nanopillars (Si NPs) in hexagonal arrays using silica nanosphere (SNS) lithography (SNL) combined with metal-assisted chemical etching (MaCE). The period of the Si NPs is easily changed by using our silica nanosphere (SNS) spin-coating process, which provides excellent monolayer uniformity and coverage (>95%) over large surface ...

  • OSA Nanopillar array on a fiber facet for highly ...

    M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. (Deerfield Beach Fla.) 24(10), OP11–OP18 (2012). [Crossref] [PubMed]

  • Fabrication, Properties and Applications of Gold Nanopillars

    Schmidt MS, Hübner J, Boisen A (2012) Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy. Adv Mater 24 (10):OP11–OP18 Google Scholar 12. Xie C et al (2010) Noninvasive neuron pinning with nanopillar arrays.

  • Publications - XSENSE

    M.S. Schmidt, J. Hübner, A. Boisen, Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy, Advanced Materials, 24(10)

  • Fabrication and photosensitivity of CdS photoresistor on ...

    The reflectivity of the silicon nanopillars has also been measured for wavelength from 400 to 1000 nm and shows the best antireflection under 5% by native silicon nanopillars with 200 nm average ...

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